#1 has incorrect grammar. For the most logical fix, maintaining a consistent tone throughout the sentence, change "was become" to "had become". Alternatively, you could change "was become" to "became" but that would leave the sentence with a messy change of tone in the middle, so I don't recommend this option.
After this correction, #2 would have the same meaning as #1.
#3 has incorrect grammar. To fix it in the most obvious manner, remove the word "been", or remove the word "become". Leave just one of these words. They have slightly different meanings so I can not tell you which one to remove - it depends on your intended meaning.
To clarify:
* WAS and HAD BEEN have equal meaning but different tone to each other.
* BECAME and HAD BECOME have equal meaning but different tone to each other.
* WAS and HAD BEEN are similar but not equal in meaning to BECAME and HAD BECOME. Because WAS and HAD BEEN refer to a singular static status, while BECAME and HAD BECOME refer to a change of status. To clarify, if you heard that HAD BEEN sleepy yesterday, you would only know that I were sleepy at some point in time yesterday - it may have been all day, or for a brief moment. But if you heard that I HAD BECOME sleepy yesterday, that implies there were a time yesterday when I were not so sleepy, then I changed, becoming sleepy, all within that day.